Measuring and modeling electrostatic adhesion in micromachines

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dc.contributor.author Tabbara, M.R.
dc.contributor.author De Boer, M.P.
dc.contributor.author Dugger, M.T.
dc.contributor.author Clews, P.J.
dc.contributor.author Michalske, T.A.
dc.date.accessioned 2018-02-20T12:21:59Z
dc.date.available 2018-02-20T12:21:59Z
dc.date.copyright 1997 en_US
dc.date.issued 2018-02-20
dc.identifier.isbn 0-7803-3829-4 en_US
dc.identifier.uri http://hdl.handle.net/10725/7107
dc.description.abstract We measure deformations of electrostatically actuated cantilever beams adhered to a substrate and compare results to numerical simulations. Beams are peroxide treated and either supercritically dried or coated with octadecyltrichlorosilane (ODTS). In air with relative humidity (RH) of about 50%, measured deformations are consistent with numerical results when an effective insulator thickness of 14 nm is assumed. This value is a measure of the roughness of the substrate. Deformations are generally reversible for voltages up to 2 V. With RH of 75%, deformations of supercritically dried beams are dominated by capillary rather than electrostatic forces. The ODTS-coated beams exhibit less effect from the capillary forces, as expected for a hydrophobic coating. en_US
dc.language.iso en en_US
dc.title Measuring and modeling electrostatic adhesion in micromachines en_US
dc.type Conference Paper / Proceeding en_US
dc.author.school SOE en_US
dc.author.idnumber 199890270 en_US
dc.author.department Civil Engineering en_US
dc.description.embargo N/A en_US
dc.keywords Electrostatic measurements en_US
dc.keywords Adhesives en_US
dc.keywords Structural beams en_US
dc.keywords Optical interferometry en_US
dc.keywords Insulation en_US
dc.keywords Voltage en_US
dc.keywords Humidity measurement en_US
dc.keywords Coatings en_US
dc.keywords Force measurement en_US
dc.keywords Actuators en_US
dc.identifier.doi http://dx.doi.org/10.1109/SENSOR.1997.613625 en_US
dc.identifier.ctation De Boer, M. P., Tabbara, M. R., Dugger, M. T., Clews, P. J., & Michalske, T. A. (1997, June). Measuring and modeling electrostatic adhesion in micromachines. In Solid State Sensors and Actuators, 1997. TRANSDUCERS'97 Chicago., 1997 International Conference on (Vol. 1, pp. 229-232). IEEE en_US
dc.author.email mtabbara@lau.edu.lb en_US
dc.conference.date 19 June 1997 en_US
dc.conference.place Chicago, IL, USA en_US
dc.conference.title 1997 International Conference on Solid State Sensors and Actuators en_US
dc.identifier.tou http://libraries.lau.edu.lb/research/laur/terms-of-use/articles.php en_US
dc.identifier.url http://ieeexplore.ieee.org/abstract/document/613625/ en_US
dc.author.affiliation Lebanese American University en_US

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