A model for low-energy thick-target bremsstrahlung produced in a scanning electron microscope

Abstract

Thick-target bremsstrahlung measurements were obtained for various atomic numbers and for energies between 10 and 25 keV. A Jeol JSM 6100 scanning electron microscope was used for the electron beam and a Oxford Instruments Link Si(Li) detector for the bremsstrahlung spectrum. The experimental data were compared with a model that computes the thick-target bremsstrahlung spectrum by integrating the tabulated relativistic partial-wave doubly differential cross-section for thin-target bremsstrahlung over the target taking electron energy loss into account in the continuous slowing down approximation. The model corrects for electron backscattering, x-ray attenuation in the target and the efficiency of the x-ray detector. Very good agreement was found between the model and the experimental results. Extension of the model to consider multiple scattering in the target is also discussed. Copyright © 2001 John Wiley & Sons, Ltd.