Tabbara, M.R.; De Boer, M.P.; Dugger, M.T.; Clews, P.J.; Michalske, T.A.
(2018-02-20)
We measure deformations of electrostatically actuated cantilever beams adhered to a substrate and compare results to numerical simulations. Beams are peroxide treated and either supercritically dried or coated with ...